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MEMS微型气体传感器芯片

  BANGENZHEGUODUFENWEIPINZHIMUBIAO、GEXINGYEDAQIJINGHUAWUPAIFANGGUIFANDEBANFASHIXING,HEGUODUDUIDAQIQINGKUANGJINGHUAHAOZHUANDEZHENGSHI,CHUCHANQIYEBIXUFUDANQIBENSHENDESHEHUIYIWU。DANDAQIJINGHUAYUANJUBEIPANGZAXING,JINGHUAWUJUBEIHUODONGXING,JIENADADOUJIGEJUBEICHUANTONGDAXINGJIANCEYIQIDEJIANCEZHANDIANLAIJIANKONGPAIFANG,JIJINSHIHAOWUYONGTUDE。WEISHIXIANDAQIJINGHUABANLIGAILIANG,XUYAODUIQINGKUANGFENWEIPINZHISHIXINGGAOMIDUJISHIJIANKONG。

  BIEDE,GENZHEQINGKUANGFENWEIPINZHIDEHAOZHUANHEHUXITIXIJIBINGDEJUZENG,RENMENDUIBENSHENQISHENKONGJIANDEWUHAIQITIHANLIANGYULAIYUCUNJUAN。HENDUOGAOJISHEQU、BINGYUANYUHUANHUIDENGDAZHONGCHANGHEDUIBENSHENJISIZHOUQINGKUANGSHIXINGLEJIXI;JUBUGAOJIQICHECHANGJIAYIDUICHENEIFENWEIPINZHISHIXINGLEJIANKONG;HAIYOUJIJIASHOUJICHANGJIAYIHUOZHENGZAIKAIPIFENWEIPINZHIJIANKONGDEXIAOWOCHUANZHESHICAOZONG,SHOUJIDECAOZONGJIANGFANKAIQITICHUANGANQICAOZONGPANGDASHICHANGDESHEXIANGKONGJIAN。

  JINCHAO,MEMSQITICHUANGANQIZAIWAIYANGYEZHISHIFANGCAIGUQI,ZAIGUOJIZEHAIDOULIUZAIDAXUE、YANTAOSUOSHIYANSHIJIEDUAN,ZHEIXIEGUOJISHIYANSHIDADOUZHENZHUODESHIBANFALUNWEN、HUODEKEYANMINGMU,QUESHAOCAICHANHUADECHANGSHIHESHIXIAN。GUOJIDADOUDAXUE、YANTAOSUODEZHEILEIFANWEIXINGJUEYILETAMENHENNANZHIZUOCHUMAOYIHUADEMEMSQITICHUANGANQIJIYANCHUCHANWU。

  JUZHENGMEMSQITICHUANGANQIPILIANGZHIZUO,TIDAIRUKOUCHANWU,BINGJINGYOUGUOCHENGYANXUYANFA,SHIXIANCHANWUGUOJIQIANGXIANCHENGDU。

  ZHEILEIXINXINGDEQITICHUANGANQIJIANGMEMSSHOUYIHENAMISHOUYILIANXIQILAI,JUBEIXIAOCHICUN、DIGONGHAO、JISUXIANGYING、GAOHUOLUODU、GAOTIAOXUANXING、GAOBUBIANXING、DIBENQIAN,SHIBIANXIESHICAOZONGHEGAOMIDUJISHIJIANKONGCAOZONGDEBAOFUTIAOXUAN。

 

        

 

  MEMSBUJUBIAOSHITU

 

  具体机能参数:

  DIBENQIAN;

  WEITIJI(XINPIANJUXI2*2mm,FENGZHUANGCHICUN5*5*1.3mm);

  GAOHUOLUODU(0.1-2ppm);

  HENSHIDIDEGONGHAO;

  CHIJIUBUBIANXING;

  ZHANGMINGMING(MEMSDERENWUSHOUMINGDAYU10000XIAOSHI);

  SHOUYIQIANGXIAN(LIANXIHOUMOSHOUYI、BOMOSHOUYIHEGUICHENDISHOUYI,CAOZONGZHUANLIPEIFANGDEQITIMINGGANCENGDUIJIYUJIAREQIHECHAZHIDIANJIDEDINGBU);

  GONGJIBAOHANZHENGHECAOZONGDIANLUZAINEIDESHIXIANDEQITICHUANGANQICAOZONGMOKUAI;

  GONGJINUODONGZHONGDUANSHUJUJIERUYUBAIHOUJIEKOU。

 

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